CASCADE MICROTECH INC - FORM 10-K - EX-23 - CONSENT OF KPMG LLP - March 1, 2011

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10-K - FORM 10-K - CASCADE MICROTECH INCd10k.htm
EX-21 - LIST OF SUBSIDIARIES - CASCADE MICROTECH INCdex21.htm
EX-32.1 - SECTION 906 CEO CERTIFICATION - CASCADE MICROTECH INCdex321.htm
EX-31.1 - SECTION 302 CEO CERTIFICATION - CASCADE MICROTECH INCdex311.htm
EX-32.2 - SECTION 906 CFO CERTIFICATION - CASCADE MICROTECH INCdex322.htm
EX-31.2 - SECTION 302 CFO CERTIFICATION - CASCADE MICROTECH INCdex312.htm

Exhibit 23

Consent of Independent Registered Public Accounting Firm

The Board of Directors and Shareholders

Cascade Microtech, Inc.:

We consent to incorporation by reference in the registration statements on Form S-8 (Nos. 333-121964, 333-145353, 333-157058, 333-161297 and 333-168692), and Form S-3 (No. 333-145349) of Cascade Microtech, Inc. of our report dated March 1, 2011, with respect to the consolidated balance sheets of Cascade Microtech, Inc. as of December 31, 2010 and 2009, and the related consolidated statements of operations, shareholders’ equity, and cash flows for each of the years in the three-year period ended December 31, 2010 and the related financial statement schedule, which report appears in the December 31, 2010 annual report on Form 10-K of Cascade Microtech, Inc.

/s/ KPMG LLP

Portland, Oregon

March 1, 2011

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