Attached files
| file | filename |
|---|---|
| EX-32.1 - EX-32.1 - FSI INTERNATIONAL INC | c61097exv32w1.htm |
| EX-21.0 - EX-21.0 - FSI INTERNATIONAL INC | c61097exv21w0.htm |
| EX-31.2 - EX-31.2 - FSI INTERNATIONAL INC | c61097exv31w2.htm |
| EX-24.0 - EX-24.0 - FSI INTERNATIONAL INC | c61097exv24w0.htm |
| EX-31.1 - EX-31.1 - FSI INTERNATIONAL INC | c61097exv31w1.htm |
| 10-K - FORM 10-K - FSI INTERNATIONAL INC | c61097e10vk.htm |
EXHIBIT 23.0
Consent of Independent Registered Public Accounting Firm
The Board of Directors
FSI International, Inc.:
FSI International, Inc.:
We consent to the incorporation by reference in the registration statements on Form S-8 (Nos.
333-30675, 333-50991, 333-96275, 333-61164, 333-104088, 333-113735,
333-122729, 333-149852, 333-158517, and 333-165955) and on Form
S-3 (Nos. 333-86148 and 333-165785) of FSI International, Inc. of our report dated November 3, 2010, with respect to the
consolidated balance sheets of FSI International, Inc. and subsidiaries as of August 28, 2010 and
August 29, 2009 and the related consolidated statements of operations, stockholders’ equity and
comprehensive loss, and cash flows for the three-year period ended August 28, 2010, and the
effectiveness of internal control over financial reporting as of August 28, 2010, which report
appears in the August 28, 2010 annual report on Form 10-K of FSI International, Inc.
/s/ KPMG LLP
Minneapolis, Minnesota
November 3, 2010
November 3, 2010