Attached files

file filename
EX-32.1 - EX-32.1 - FSI INTERNATIONAL INCc61097exv32w1.htm
EX-31.2 - EX-31.2 - FSI INTERNATIONAL INCc61097exv31w2.htm
EX-24.0 - EX-24.0 - FSI INTERNATIONAL INCc61097exv24w0.htm
EX-23.0 - EX-23.0 - FSI INTERNATIONAL INCc61097exv23w0.htm
EX-31.1 - EX-31.1 - FSI INTERNATIONAL INCc61097exv31w1.htm
10-K - FORM 10-K - FSI INTERNATIONAL INCc61097e10vk.htm
Exhibit 21.0
SUBSIDIARIES
     
    JURISDICTION OF
NAME   INCORPORATION
FSI International Asia, Ltd.
  Taiwan
FSI International (France) SARL
  France
FSI International (Germany) GmbH
  Germany
FSI International (Italy) S.r.l.
  Italy
FSI International Netherlands B.V.
  The Netherlands
FSI International (Holding) B.V.
  The Netherlands
FSI International (UK) Limited
  Scotland
FSI International (Shanghai) Co., Ltd.
  Peoples Republic of China
FSI International (Korea) Co., Ltd.
  Korea
FSI International Semiconductor Equipment Pte Ltd
  Singapore
FSI International Israel, Ltd.
  Israel
SCD Mountain View, Inc.
  Minnesota
Semiconductor Systems, Inc.
  California
FSI International, Inc. also owns a 20% interest in Apprecia Technology, Inc.