Attached files
Exhibit 21.1
GSI GROUP INC. SUBSIDIARIES
| Subsidiary | Place of Incorporation | |
| GSI Group Corporation | Michigan | |
| GSI Group Japan Corporation | Japan | |
| GSI Group Singapore Pte. Ltd. | Singapore | |
| GSI Limited Holdings Corporation | New Brunswick, Canada | |
| GSI Group GmbH | Germany | |
| GSI Limited Holdings II Corporation | New Brunswick, Canada | |
| GSI Group Limited UK | United Kingdom | |
| GSI Lumonics SARL | France | |
| Westwind Air Bearings Limited UK | United Kingdom | |
| GSI Group Precision Technologies (Suzhou) Co., Ltd. | China | |
| General Scanning Securities Corporation | Massachusetts | |
| MicroE Systems Corp. | Delaware | |
| MES International Inc. | Delaware | |
| GSI Lumonics Asia Pacific Ltd. | Hong Kong | |
| Excel Technology, Inc. | Delaware | |
| Cambridge Technology, Inc. | Massachusetts | |
| The Optical Corporation | California | |
| Control Laser Corporation (d/b/a Baublys Control Laser) | Florida | |
| Synrad, Inc. | Washington | |
| Continuum Electro-Optics, Inc. | Delaware | |
| Photo Research, Inc. | Delaware | |
| Quantronix Corporation | Delaware | |
| Excel Laser Technology | India | |
| Excel Technology Asia Sdn. Bhd | Malaysia | |
| Excel Technology Europe GmbH | Germany | |
| Excel Technology Lanka (Pvt.) Ltd. | Sri Lanka | |
| Excel Technology Japan Holding Co., Ltd. | Japan | |
| D. (Green Electronics), Ltd. | United Kingdom | |
| Excel Technology Italy Srl | Italy | |
| Baublys Control Laser GmbH | Germany | |
| Excel Technology France S.A.S. | France | |
| Excel Technology Japan K.K. | Japan | |