Attached files

file filename
10-K - FORM 10-K - ONTO INNOVATION INC.d10k.htm
EX-10.25 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - TIMOTHY J. STULTZ, PH.D. - ONTO INNOVATION INC.dex1025.htm
EX-10.24 - 2010 EXECUTIVE PERFORMANCE BONUS PLAN - ONTO INNOVATION INC.dex1024.htm
EX-10.26 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - BRUCE CRAWFORD - ONTO INNOVATION INC.dex1026.htm
EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - ONTO INNOVATION INC.dex211.htm
EX-23.1 - CONSENT OF BDO SEIDMAN, LLP - ONTO INNOVATION INC.dex231.htm
EX-31.1 - CERTIFICATION OF PEO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex311.htm
EX-31.2 - CERTIFICATION OF PFO AND PAO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex312.htm
EX-10.27 - AMENDED AND RESTATED EMPLOYMENT AGREEMENT - JAMES P. MONIZ - ONTO INNOVATION INC.dex1027.htm

Exhibit 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER

PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED

PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Each of the undersigned hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, in his capacity as an officer of Nanometrics Incorporated (the “Company”) that based on his knowledge:

 

  1. The Annual Report on Form 10-K of the Company for the fiscal year ended January 2, 2010 (the “Report”) fully complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934, as amended, and

 

  2. The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

 

Date: March 26, 2010     By:  

  /S/ TIMOTHY J. STULTZ

    Name:     Timothy J. Stultz
    Title:     Chief Executive Officer
Date: March 26, 2010     By:  

  /S/ JAMES P. MONIZ

    Name:     James P. Moniz
    Title:     Chief Financial Officer