Attached files

file filename
10-K - FORM 10-K - ONTO INNOVATION INC.d10k.htm
EX-10.25 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - TIMOTHY J. STULTZ, PH.D. - ONTO INNOVATION INC.dex1025.htm
EX-10.24 - 2010 EXECUTIVE PERFORMANCE BONUS PLAN - ONTO INNOVATION INC.dex1024.htm
EX-10.26 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - BRUCE CRAWFORD - ONTO INNOVATION INC.dex1026.htm
EX-23.1 - CONSENT OF BDO SEIDMAN, LLP - ONTO INNOVATION INC.dex231.htm
EX-31.1 - CERTIFICATION OF PEO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex311.htm
EX-31.2 - CERTIFICATION OF PFO AND PAO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex312.htm
EX-32.1 - CERTIFICATION OF PEO AND PFO PURSUANT TO SECTION 906 - ONTO INNOVATION INC.dex321.htm
EX-10.27 - AMENDED AND RESTATED EMPLOYMENT AGREEMENT - JAMES P. MONIZ - ONTO INNOVATION INC.dex1027.htm

Exhibit 21.1

List of Subsidiaries

 

Name

 

Jurisdiction

Accent Optical Technologies France   France
Accent Optical Technologies (Germany) GmbH   Germany
Accent Optical Technologies, Israel   Israel
Accent Optical Technologies (Switzerland) GmbH   Switzerland
Accent Optical Technologies (U.K.) Ltd.   United Kingdom
Nanometrics China Company Ltd.   China
Nanometrics Israel, Ltd.   Israel
Nanometrics Japan, Ltd.   Japan
Nanometrics Korea Limited   South Korea
Nanometrics Southeast Asia Pte. Limited   Singapore
Soluris (France) EURL   France