ONTO INNOVATION INC. - FORM 10-K - EX-23.1 - CONSENT OF BDO SEIDMAN, LLP - March 26, 2010

Attached files

file filename
10-K - FORM 10-K - ONTO INNOVATION INC.d10k.htm
EX-10.25 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - TIMOTHY J. STULTZ, PH.D. - ONTO INNOVATION INC.dex1025.htm
EX-10.24 - 2010 EXECUTIVE PERFORMANCE BONUS PLAN - ONTO INNOVATION INC.dex1024.htm
EX-10.26 - AMENDED AND RESTATED EXECUTIVE SEVERANCE AGREEMENT - BRUCE CRAWFORD - ONTO INNOVATION INC.dex1026.htm
EX-21.1 - SUBSIDIARIES OF THE REGISTRANT - ONTO INNOVATION INC.dex211.htm
EX-31.1 - CERTIFICATION OF PEO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex311.htm
EX-31.2 - CERTIFICATION OF PFO AND PAO PURSUANT TO SECTION 302 - ONTO INNOVATION INC.dex312.htm
EX-32.1 - CERTIFICATION OF PEO AND PFO PURSUANT TO SECTION 906 - ONTO INNOVATION INC.dex321.htm
EX-10.27 - AMENDED AND RESTATED EMPLOYMENT AGREEMENT - JAMES P. MONIZ - ONTO INNOVATION INC.dex1027.htm

Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

Nanometrics Incorporated

Milpitas, California

We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557, 333-149339 and 333-164088) and on Form S-3 (No. 333-163168) of Nanometrics Incorporated of our report dated March 26, 2010, relating to the consolidated financial statements and financial statement schedule, which appears in this Form 10-K.

/s/ BDO Seidman, LLP

San Francisco, California

March 26, 2010

ONTO INNOVATION INC. Reports