Attached files
file | filename |
---|---|
10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2197155z10-k.htm |
EX-31.2 - EXHIBIT 31.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_2.htm |
EX-10.9 - EXHIBIT 10.9 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_9.htm |
EX-23.1 - EXHIBIT 23.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-23_1.htm |
EX-32.2 - EXHIBIT 32.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-32_2.htm |
EX-21.1 - EXHIBIT 21.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-21_1.htm |
EX-31.1 - EXHIBIT 31.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_1.htm |
EX-10.2 - EXHIBIT 10.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_2.htm |
EX-10.10 - EXHIBIT 10.10 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_10.htm |
QuickLinks -- Click here to rapidly navigate through this document
AXCELIS TECHNOLOGIES, INC.
Certification of the Chief Executive Officer
Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code
The undersigned Chief Executive Officer of Axcelis Technologies, Inc., a Delaware corporation, hereby certifies, for the purposes of Section 1350 of Chapter 63 of title 18 of the United States Code (as implemented by Section 906 of the Sarbanes-Oxley Act of 2002) as follows:
This Form 10-K annual report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company.
IN WITNESS WHEREOF, the undersigned has executed this Certification as of March 15, 2010.
/s/ MARY G. PUMA Mary G. Puma Chairman, Chief Executive Officer and President of Axcelis Technologies, Inc. |