Attached files
| file | filename |
|---|---|
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2197155z10-k.htm |
| EX-31.2 - EXHIBIT 31.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_2.htm |
| EX-10.9 - EXHIBIT 10.9 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_9.htm |
| EX-23.1 - EXHIBIT 23.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-23_1.htm |
| EX-32.2 - EXHIBIT 32.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-32_2.htm |
| EX-32.1 - EXHIBIT 32.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-32_1.htm |
| EX-31.1 - EXHIBIT 31.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_1.htm |
| EX-10.2 - EXHIBIT 10.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_2.htm |
| EX-10.10 - EXHIBIT 10.10 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_10.htm |
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Axcelis Technologies, Inc.
Exhibit 21.1 to Form 10-K for the year ended December 31, 2009
Subsidiaries
The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:
Domestic Subsidiaries
- 1.
- Axcelis Technologies CCS Corporation a Delaware corporation
- 2.
- Fusion Technology International, Inc., a Delaware corporation
- 3.
- Axcelis Technologies (Israel), Inc., a Delaware corporation
- 4.
- Fusion Investments, Inc., a Maryland corporation
- 5.
- High Temperature Engineering Corporation, a Delaware corporation
European Subsidiaries
- 6.
- Axcelis Technologies, GmbH (Germany)
- 7.
- Axcelis Technologies, S.r.l (Italy)
- 8.
- Axcelis Technologies, Sarl (France)
- 9.
- Axcelis Technologies, Ltd. (U.K.)
- 10.
- Matrix Europe N.V. (Belgium)
Asian Subsidiaries
- 11.
- Axcelis Technologies, KK (Japan)
- 12.
- Axcelis Technologies Limited (Korea)
- 13.
- Axcelis Technologies Ltd. (Taiwan)
- 14.
- Axcelis Technologies Pte. Ltd. (Singapore)
- 15.
- Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China)