Attached files
| file | filename |
|---|---|
| 10-K - 10-K - AXCELIS TECHNOLOGIES INC | a2197155z10-k.htm |
| EX-31.2 - EXHIBIT 31.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_2.htm |
| EX-10.9 - EXHIBIT 10.9 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_9.htm |
| EX-32.2 - EXHIBIT 32.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-32_2.htm |
| EX-21.1 - EXHIBIT 21.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-21_1.htm |
| EX-32.1 - EXHIBIT 32.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-32_1.htm |
| EX-31.1 - EXHIBIT 31.1 - AXCELIS TECHNOLOGIES INC | a2197155zex-31_1.htm |
| EX-10.2 - EXHIBIT 10.2 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_2.htm |
| EX-10.10 - EXHIBIT 10.10 - AXCELIS TECHNOLOGIES INC | a2197155zex-10_10.htm |
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CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in the following Registration Statements:
- (1)
- Registration
Statement (Form S-8 No. 333-49726) pertaining to the Employee Stock Purchase Plan of Axcelis
Technologies, Inc.; and
- (2)
- Registration Statements (Form S-8 No. 333-49768 and No. 333-120356) pertaining to the 2000 Stock Plan of Axcelis Technologies, Inc.;
of our reports dated March 15, 2010 with respect to the consolidated financial statements and schedule of Axcelis Technologies, Inc. and the effectiveness of internal control over financial reporting of Axcelis Technologies, Inc., included in this Annual Report (Form 10-K) for the year ended December 31, 2009.
/s/ Ernst & Young LLP
Boston,
Massachusetts
March 15, 2010