Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - SEMITOOL INC | form10k-093009.htm |
| EX-31.1 - EXHIBIT 31.1 - SEMITOOL INC | exhibit31-1.htm |
| EX-32.1 - EXHIBIT 32.1 - SEMITOOL INC | exhibit32-1.htm |
| EX-31.2 - EXHIBIT 31.2 - SEMITOOL INC | exhibit31-2.htm |
| EX-21.1 - EXHIBIT 21.1 - SEMITOOL INC | exhibit21-1.htm |
| EX-32.2 - EXHIBIT 32.2 - SEMITOOL INC | exhibit32-2.htm |
EXHIBIT
23.1
CONSENT
OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We
have issued our reports dated December 14, 2009 with respect to the consolidated
financial statements, schedule, and internal control over financial reporting
included in the Annual Report of Semitool, Inc. on Form 10-K for the year ended
September 30, 2009. We hereby consent to the incorporation by reference of said
reports in the Registration Statements of Semitool, Inc. on Forms S-3 (File No.
333-112964) and on Forms S-8 (File No. 333-114284, File No. 333-62474, File No.
333-89562 and File No. 333-142815).
/s/ GRANT THORNTON
LLP
Salt Lake City,
Utah
December 14,
2009