Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - SEMITOOL INC | form10k-093009.htm |
| EX-31.1 - EXHIBIT 31.1 - SEMITOOL INC | exhibit31-1.htm |
| EX-32.1 - EXHIBIT 32.1 - SEMITOOL INC | exhibit32-1.htm |
| EX-31.2 - EXHIBIT 31.2 - SEMITOOL INC | exhibit31-2.htm |
| EX-32.2 - EXHIBIT 32.2 - SEMITOOL INC | exhibit32-2.htm |
| EX-23.1 - EXHIBIT 23.1 - SEMITOOL INC | exhibit23-1.htm |
EXHIBIT
21.1
SUBSIDIARIES
OF REGISTRANT
|
Name
|
Jurisdiction
of Incorporation
|
|
|
Semitool
Europe Ltd.
|
United
Kingdom
|
|
|
Semitool
Halbleitertechnik Vertriebs GmbH
|
Germany
|
|
|
Semitool
France SARL
|
France
|
|
|
Semitool
Italia SRL
|
Italy
|
|
|
Semitool
Japan Inc.
|
Japan
|
|
|
Semitool
Korea, Inc.
|
Korea
|
|
|
Semitool
(Asia) Pte Ltd.
|
Singapore
|
|
|
Rhetech,
Inc.
|
Delaware
|
|
|
Semitool
Austria GmbH
|
Austria
|
|
|
Semitool
Israel, Limited
|
Israel
|
|
|
Semitool
Schweiz GmbH
|
Switzerland
|
|
|
Semitool
Semiconductor Equipment Technology (Shanghai) Co., LTD.
|
China
|
|
|
Semitool
(Taiwan) Inc.
|
Nevada
|
|
|
Semitool
(Philippines) Inc.
|
Nevada
|