Attached files
| file | filename |
|---|---|
| EX-32.2 - EX-32.2 - ONTO INNOVATION INC. | onto-ex322_7.htm |
| EX-32.1 - EX-32.1 - ONTO INNOVATION INC. | onto-ex321_12.htm |
| EX-31.2 - EX-31.2 - ONTO INNOVATION INC. | onto-ex312_9.htm |
| EX-31.1 - EX-31.1 - ONTO INNOVATION INC. | onto-ex311_6.htm |
| EX-21.1 - EX-21.1 - ONTO INNOVATION INC. | onto-ex211_11.htm |
| 10-K - 10-K - ONTO INNOVATION INC. | onto-10k_20201226.htm |
Consent of Independent Registered Public Accounting Firm
We consent to the incorporation by reference in the following Registration Statements:
|
|
(1) |
Registration Statement (Form S-8 No. 333-40866) pertaining to the Nanometrics Incorporated Amended and Restated 2003 Employee Stock Purchase Plan, and |
|
|
|
(2) |
Registration Statement (Form S-8 No. 333-238492) pertaining to the Onto Innovation Inc. 2020 Employee Stock Purchase Plan. |
|
of our reports dated February 19, 2021, with respect to the consolidated financial statements of Onto Innovation Inc. and the effectiveness of internal control over financial reporting of Onto Innovation Inc. included in this Annual Report (Form 10-K) of Onto Innovation Inc. for the year ended December 26, 2020.
/s/ Ernst & Young LLP
Iselin, New Jersey
February 19, 2021