Attached files

file filename
EX-32.2 - EX-32.2 - ONTO INNOVATION INC.onto-ex322_7.htm
EX-32.1 - EX-32.1 - ONTO INNOVATION INC.onto-ex321_12.htm
EX-31.2 - EX-31.2 - ONTO INNOVATION INC.onto-ex312_9.htm
EX-31.1 - EX-31.1 - ONTO INNOVATION INC.onto-ex311_6.htm
EX-23.1 - EX-23.1 - ONTO INNOVATION INC.onto-ex231_13.htm
10-K - 10-K - ONTO INNOVATION INC.onto-10k_20201226.htm

Exhibit 21.1

 

SUBSIDIARIES

 

 

Name

 

Jurisdiction

Rudolph Technologies, Inc.

 

U.S.A.

4D Technology Corporation

 

U.S.A.

Onto Innovation Japan Co. Ltd.

 

Japan

Onto Innovation (Shanghai) Trading Co., Ltd.

 

China

Nanometrics China Company Ltd.

 

China

Onto Innovation Germany GmbH

 

Germany

Accent Optical Technologies (Germany) GmbH

 

Germany

Rudolph Technologies Hong Kong Limited

 

Hong Kong

Onto Innovation Europe, B.V.

 

Netherlands

Nanometrics France S.A.S.

 

France

Nanometrics (Switzerland) GmbH

 

Switzerland

Nanometrics U.K. Ltd.

 

United Kingdom

Nanometrics Israel, Ltd.

 

Israel

Onto Innovation Korea Ltd.

 

Korea

Onto Innovation Southeast Asia Pte. Limited

 

Singapore

Onto Innovation Ireland Limited

 

Ireland