Attached files
| file | filename |
|---|---|
| EX-32.2 - EX-32.2 - AMTECH SYSTEMS INC | asys-ex322_10.htm |
| EX-32.1 - EX-32.1 - AMTECH SYSTEMS INC | asys-ex321_12.htm |
| EX-31.2 - EX-31.2 - AMTECH SYSTEMS INC | asys-ex312_6.htm |
| EX-31.1 - EX-31.1 - AMTECH SYSTEMS INC | asys-ex311_7.htm |
| EX-24 - EX-24 - AMTECH SYSTEMS INC | asys-ex24_9.htm |
| EX-21.1 - EX-21.1 - AMTECH SYSTEMS INC | asys-ex211_8.htm |
| EX-4.2 - EX-4.2 - AMTECH SYSTEMS INC | asys-ex42_13.htm |
| 10-K - 10-K - AMTECH SYSTEMS INC | asys-10k_20200930.htm |
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
As an independent registered public accounting firm we hereby consent to the incorporation by reference in Registration Statement on Forms S-1 (Nos. 333-139592, 333-146856, and 333-147440), Form S-3 (No. 333-215604), and Forms S-8 (Nos. 333-09911, 333-131051, 333-145454, 333-168606, 333-168607, 333-196937, 333-196940 and 333-204431) of our report dated November 19, 2020, with respect to the consolidated financial statements of Amtech Systems, Inc., as of September 30, 2020 and 2019 and for each of the three years in the period ended September 30, 2020, and our report dated November 19, 2020 relating to the effectiveness of Amtech Systems, Inc.’s internal controls over financial reporting as of September 30, 2020, included in this Annual Report on Form 10-K of Amtech Systems, Inc. for the year ended September 30, 2020.
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/s/ MAYER HOFFMAN MCCANN P.C. |
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Phoenix, Arizona November 19, 2020 |
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