Attached files
| file | filename |
|---|---|
| EX-32.2 - EX-32.2 - AMTECH SYSTEMS INC | asys-ex322_10.htm |
| EX-32.1 - EX-32.1 - AMTECH SYSTEMS INC | asys-ex321_12.htm |
| EX-31.2 - EX-31.2 - AMTECH SYSTEMS INC | asys-ex312_6.htm |
| EX-31.1 - EX-31.1 - AMTECH SYSTEMS INC | asys-ex311_7.htm |
| EX-24 - EX-24 - AMTECH SYSTEMS INC | asys-ex24_9.htm |
| EX-23.1 - EX-23.1 - AMTECH SYSTEMS INC | asys-ex231_11.htm |
| EX-4.2 - EX-4.2 - AMTECH SYSTEMS INC | asys-ex42_13.htm |
| 10-K - 10-K - AMTECH SYSTEMS INC | asys-10k_20200930.htm |
Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
|
Name |
|
Jurisdiction in which incorporated |
|
Bruce Technologies, Inc |
|
State of Massachusetts |
|
|
|
|
|
BTU Europe Ltd. |
|
State of Delaware |
|
|
|
|
|
BTU International, Inc. |
|
State of Delaware |
|
|
|
|
|
BTU Ltd. (Shanghai) |
|
State of Delaware |
|
|
|
|
|
BTU Overseas, Ltd. |
|
State of Delaware |
|
|
|
|
|
BTU Overseas (Shanghai) Co., Ltd |
|
State of Delaware |
|
|
|
|
|
P.R. Hoffman Machine Products, Inc |
|
State of Arizona |
|
|
|
|
|
Tempress Systems, Inc. |
|
State of Texas |