Attached files
| file | filename |
|---|---|
| 10-K - 10-K - MKS INSTRUMENTS INC | d114808d10k.htm |
| EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d114808dex321.htm |
| EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d114808dex312.htm |
| EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d114808dex311.htm |
| EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d114808dex231.htm |
| EX-10.29 - EX-10.29 - MKS INSTRUMENTS INC | d114808dex1029.htm |
| EX-4.2 - EX-4.2 - MKS INSTRUMENTS INC | d114808dex42.htm |
| EX-4.1 - EX-4.1 - MKS INSTRUMENTS INC | d114808dex41.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |
| Beijing Newport Spectra-Physics Technologies Co., Ltd. | China | |
| Electro Scientific Industries Europe Ltd | United Kingdom | |
| Electro Scientific Industries GmbH | Germany | |
| Electro Scientific Industries Singapore Pte. Ltd. | Singapore | |
| Electro Scientific Industries, Inc. | Oregon | |
| Eolite Systems SAS | France | |
| ESI China, Inc. | Oregon | |
| ESI Electronic Equipment (Shanghai) Co., Ltd. | China | |
| ESI International Corporation | Oregon | |
| ESI Japan, K.K. | Japan | |
| ESI Korea, Inc. | Korea | |
| ESI Vietnam Company Limited | Vietnam | |
| High Q Laser GmbH | Austria | |
| Micro-Controle Spectra-Physics S.A.S. | France | |
| MKS Denmark ApS | Denmark | |
| MKS German Holding GmbH | Germany | |
| MKS Instruments (China) Company Ltd. | China | |
| MKS Instruments (Hong Kong) Limited | Hong Kong | |
| MKS Instruments (Singapore) Pte. Ltd. | Singapore | |
| MKS Instruments Deutschland GmbH | Germany | |
| MKS Instruments ESI Switzerland GmbH | Switzerland | |
| MKS Instruments Holdings Ltd | United Kingdom | |
| MKS Instruments Israel Ltd. | Israel | |
| MKS Instruments Italy S.r.l. | Italy | |
| MKS Instruments Mexico S. de R.L. de C.V. | Mexico | |
| MKS Instruments UK Limited | United Kingdom | |
| MKS Spectra Holdings Limited | United Kingdom | |
| MKS Japan, Inc. | Japan | |
| MKS Korea Ltd. | Korea | |
| MKS Taiwan Technology Limited | Taiwan | |
| Newport Corporation | Nevada | |
| Newport Instruments Canada Corporation | Canada | |
| Newport Laser Holding GmbH | Austria | |
| Newport Ophir Holdings Ltd. | Israel | |
| Newport Opto-Electronics Technologies (Korea), LLC | Korea | |
| Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. | Singapore | |
| Newport Opto-Electronics Technologies (Wuxi) Company Limited | China | |
| Newport Spectra-Physics B.V. | Netherlands | |
| Newport Spectra-Physics GmbH | Germany | |
| Newport Spectra-Physics Limited | United Kingdom | |
| Ophir Japan Ltd. | Japan | |
| Ophir Optics S.R.L. | Romania | |
| Ophir Optronics GmbH | Germany | |
| Ophir Optronics Ltd. | Israel | |
| Ophir Optronics Solutions Ltd. | Israel | |
| Ophir Spiricon Europe GmbH | Germany | |
| Ophir-Spiricon, LLC | Utah | |
| Spectra-Physics, K.K. | Japan | |
| V-Gen Ltd. | Israel |