Attached files
| file | filename |
|---|---|
| EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d326475dex321.htm |
| EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d326475dex312.htm |
| EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d326475dex311.htm |
| EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d326475dex231.htm |
| EX-10.10 - EX-10.10 - MKS INSTRUMENTS INC | d326475dex1010.htm |
| EX-10.8 - EX-10.8 - MKS INSTRUMENTS INC | d326475dex108.htm |
| 10-K - FORM 10-K - MKS INSTRUMENTS INC | d326475d10k.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
| Beijing Newport Spectra-Physics Technologies Co., Ltd. |
China | |||
| FEMTOLASERS Produktions GmbH |
Austria | |||
| Femtolasers, Inc. |
Delaware | |||
| High Q Laser GmbH |
Austria | |||
| Hilger Analytical Limited |
United Kingdom | |||
| Micro-Controle Spectra-Physics S.A.S. |
France | |||
| MKS Denmark ApS |
Denmark | |||
| MKS German Holding GmbH |
Germany | |||
| MKS Instruments (China) Company Limited |
China | |||
| MKS Instruments (Hong Kong) Limited |
Hong Kong | |||
| MKS Instruments (Shanghai) Limited |
China | |||
| MKS Instruments (Singapore) Pte. Ltd. |
Singapore | |||
| MKS Instruments AB |
Sweden | |||
| MKS Instruments Deutschland GmbH |
Germany | |||
| MKS Instruments Holdings Ltd |
United Kingdom | |||
| MKS Instruments Israel Ltd. |
Israel | |||
| MKS Instruments Italy S.r.l. |
Italy | |||
| MKS Instruments UK Limited |
United Kingdom | |||
| MKS International Holdings Limited |
United Kingdom | |||
| MKS Japan, Inc. |
Japan | |||
| MKS Korea Ltd. |
Korea | |||
| MKS Luxembourg S.a.r.l. |
Luxembourg | |||
| MKS Taiwan Technology Limited |
Taiwan | |||
| Newport Corporation |
Nevada | |||
| Newport Corporation (Barbados) SRL |
Barbados | |||
| Newport Domestic International Sales Corporation |
California | |||
| Newport European Distribution Company |
California | |||
| Newport Government Systems, Inc. |
California | |||
| Newport Instruments Canada Corporation |
California | |||
| Newport Laser Holding GmbH |
Austria | |||
| Newport Ophir Holdings Ltd. |
Israel | |||
| Newport Opto-Electronics Technologies (Korea), LLC |
Korea | |||
| Newport Opto-Electronics Technologies (Singapore) Pte. Ltd. |
Singapore | |||
| Newport Opto-Electronics Technologies (Wuxi) Company Limited |
China | |||
| Newport Spectra-Physics BV |
Netherlands | |||
| Newport Spectra-Physics GmbH |
Germany | |||
| Newport Spectra-Physics Limited |
United Kingdom | |||
| Ophir Holdings, LLC |
Massachusetts | |||
| Ophir Japan Ltd. |
Japan | |||
| Ophir Optics Europe GmbH |
Switzerland | |||
| Ophir Optics SRL |
Romania | |||
| Ophir Optronics GmbH |
Germany | |||
| Ophir Optronics Ltd. |
Israel | |||
| Ophir Optronics Solutions Ltd. |
Israel | |||
| Ophir Spiricon Europe GmbH |
Germany | |||
| Ophir-Spiricon, LLC |
Utah | |||
| Optical Metrology Ltd. |
Israel | |||
| Spectra-Physics, K.K. |
Japan | |||
| Telvac Engineering Limited |
United Kingdom | |||
| VGen Technology (Shenzhen) Ltd. |
China | |||
| V-Gen Ltd. |
Israel |