ELECTRO SCIENTIFIC INDUSTRIES INC - FORM 10-K - EX-23.1 - EXHIBIT 23.1 CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - D&T - June 14, 2016

Attached files

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EX-10.23 - EXHIBIT 10.23 SOSAR AWARDS BETWEEN MAY 2011 AND APRIL 2015 - ELECTRO SCIENTIFIC INDUSTRIES INCex-1023may2011sosarform.htm
EX-21 - EXHIBIT 21 SUBSIDIARIES OF THE COMPANY - ELECTRO SCIENTIFIC INDUSTRIES INCex-21subsidiariesofthecomp.htm
10-K - 10-K FY2016 - ELECTRO SCIENTIFIC INDUSTRIES INCesi10-k04022016.htm
EX-32.2 - EXHIBIT 32.2 SECTION 1350 CERT - ELECTRO SCIENTIFIC INDUSTRIES INCex-322certificationofchief.htm
EX-32.1 - EXHIBIT 32.1 SECTION 1350 CERT - ELECTRO SCIENTIFIC INDUSTRIES INCex-321certificationofchief.htm
EX-31.2 - EXHIBIT 31.2 SEC 302 CERT - ELECTRO SCIENTIFIC INDUSTRIES INCex-312certificationofthech.htm
EX-31.1 - EXHIBIT 31.1 SEC 302 CERT - ELECTRO SCIENTIFIC INDUSTRIES INCex-311certificationofthech.htm
EX-24.7 - EXHIBIT 24.7 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-247powerofattorneyforri.htm
EX-24.6 - EXHIBIT 24.6 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-246powerofattorneyforjo.htm
EX-24.5 - EXHIBIT 24.5 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-245powerofattorneyforra.htm
EX-24.4 - EXHIBIT 24.4 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-244powerofattorneyforla.htm
EX-24.3 - EXHIBIT 24.3 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-243powerofattorneyfored.htm
EX-24.2 - EXHIBIT 24.2 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-242powerofattorneyforro.htm
EX-24.1 - EXHIBIT 24.1 POA - ELECTRO SCIENTIFIC INDUSTRIES INCex-241powerofattorneyforfr.htm
EX-23.2 - EXHIBIT 23.2 CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - KPMG LLP - ELECTRO SCIENTIFIC INDUSTRIES INCex-232consentofindependent.htm
EX-10.24 - EXHIBIT 10.24 SOSAR AWARDS AFTER APRIL 2015 - ELECTRO SCIENTIFIC INDUSTRIES INCex-1024sosaragreementforaw.htm


EXHIBIT 23 .1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the incorporation by reference in Registration Statements Nos. 333-55060, 333-67356, 333-88411, 333-122660, 333-122661, 333-137878, 333-137879, 333-146107, 333-151804, 333-155978, 333-162876 and 333-199166 on Form S-8 of our reports dated June 14, 2016, relating to the financial statements of Electro Scientific Industries, Inc., and the effectiveness of Electro Scientific Industries, Inc.'s internal control over financial reporting, appearing in this Annual Report on Form 10-K of Electro Scientific Industries, Inc. for the year ended April 2, 2016.

 
/s/ Deloitte & Touche LLP
 
Portland, Oregon
June 14, 2016



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