Attached files
file | filename |
---|---|
EXCEL - IDEA: XBRL DOCUMENT - MKS INSTRUMENTS INC | Financial_Report.xls |
EX-31.1 - EX-31.1 - MKS INSTRUMENTS INC | d838776dex311.htm |
EX-23.1 - EX-23.1 - MKS INSTRUMENTS INC | d838776dex231.htm |
EX-31.2 - EX-31.2 - MKS INSTRUMENTS INC | d838776dex312.htm |
EX-32.1 - EX-32.1 - MKS INSTRUMENTS INC | d838776dex321.htm |
EX-10.11 - EX-10.11 - MKS INSTRUMENTS INC | d838776dex1011.htm |
EX-10.27 - EX-10.27 - MKS INSTRUMENTS INC | d838776dex1027.htm |
10-K - 10-K - MKS INSTRUMENTS INC | d838776d10k.htm |
EXHIBIT 21.1
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARY | JURISDICTION OF INCORPORATION | |||
Alter S.r.l. | Italy | |||
ASTeX GmbH | Germany | |||
MKS Denmark ApS | Denmark | |||
MKS German Holding GmbH | Germany | |||
MKS Instruments (Asia) Ltd. | Bermuda | |||
MKS Instruments (China) Company Limited | China | |||
MKS Instruments Deutschland GmbH | Germany | |||
MKS Instruments Holdings Ltd. | United Kingdom | |||
MKS Instruments (Hong Kong) Limited | Hong Kong | |||
MKS Instruments (Shanghai) Limited | China | |||
MKS Instruments (Singapore) Pte. Ltd. | Singapore | |||
MKS Instruments UK.Limited | United Kingdom | |||
MKS Japan, Inc. | Japan | |||
MKS Korea Ltd. | Korea | |||
MKS Luxembourg S.a.r.l. | Luxembourg | |||
MKS Spectra Holdings Limited | United Kingdom | |||
MKS Taiwan Technology Limited | Taiwan | |||
MKS Technology Limited | United Kingdom | |||
MKS Tega Ltd. | Israel | |||
MKS Tenta Products Ltd. | Israel | |||
MKS Umetrics AB | Sweden | |||
Orion Metrology, Inc. | California | |||
Plasmart, Inc. | Korea | |||
Telvac Engineering Limited | United Kingdom | |||
Umetrics, Inc. | New Jersey | |||
Umetrics UK Limited | United Kingdom |