Attached files
file | filename |
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10-Q - FORM 10-Q - FSI INTERNATIONAL INC | d368379d10q.htm |
EX-31.2 - CERTIFICATION BY PRINCIPAL FINANCIAL AND ACCOUNTING OFFICER - FSI INTERNATIONAL INC | d368379dex312.htm |
EX-10.1 - INCENTIVE COMPENSATION PLAN - FSI INTERNATIONAL INC | d368379dex101.htm |
EX-31.1 - CERTIFICATION BY PRINCIPAL EXECUTIVE OFFICER - FSI INTERNATIONAL INC | d368379dex311.htm |
EXCEL - IDEA: XBRL DOCUMENT - FSI INTERNATIONAL INC | Financial_Report.xls |
EXHIBIT 32.1
CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 (18 U.S.C. SECTION 1350)
In connection with the Quarterly Report of FSI International, Inc., a Minnesota corporation (the Company), on Form 10-Q for the quarter ended May 26, 2012 as filed with the Securities and Exchange Commission (the Report), each of the undersigned hereby certifies, pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to the undersigneds knowledge:
(1) The Report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934; and
(2) The information contained in the Report fairly presents, in all material respects, the financial condition and result of operations of the Company.
Date: June 28, 2012 | ||||||
/s/ Donald S. Mitchell | ||||||
Donald S. Mitchell | ||||||
Chairman, President and | ||||||
Chief Executive Officer |
/s/ Patricia M. Hollister | ||||||
Patricia M. Hollister | ||||||
Chief Financial Officer and | ||||||
Assistant Secretary |