Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - FSI INTERNATIONAL INCFinancial_Report.xls
10-Q - FORM 10-Q - FSI INTERNATIONAL INCd264695d10q.htm
EX-10.1 - EXHIBIT 10.1 - FSI INTERNATIONAL INCd264695dex101.htm
EX-31.2 - EXHIBIT 31.2 - FSI INTERNATIONAL INCd264695dex312.htm
EX-31.1 - EXHIBIT 31.1 - FSI INTERNATIONAL INCd264695dex311.htm

EXHIBIT 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002 (18 U.S.C. SECTION 1350)

In connection with the Quarterly Report of FSI International, Inc., a Minnesota corporation (the “Company”), on Form 10-Q for the quarter ended November 26, 2011 as filed with the Securities and Exchange Commission (the “Report”), each of the undersigned hereby certifies, pursuant to § 906 of the Sarbanes-Oxley Act of 2002 (18 U.S.C. § 1350), that to the undersigned’s knowledge:

(1) The Report fully complies with the requirements of section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

(2) The information contained in the Report fairly presents, in all material respects, the financial condition and result of operations of the Company.

Date: December 29, 2011

 

/s/ Donald S. Mitchell

Donald S. Mitchell
Chairman, President and
Chief Executive Officer

 

/s/ Patricia M. Hollister

Patricia M. Hollister
Chief Financial Officer and
Assistant Secretary

 

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