Attached files

file filename
EX-31.1 - CERTIFICATION OF CEO PURSUANT TO SECTION 302 - Ultra Clean Holdings, Inc.dex311.htm
EX-31.2 - CERTIFICATION OF CFO PURSUANT TO SECTION 302 - Ultra Clean Holdings, Inc.dex312.htm
EX-21.1 - SUBSIDIARIES OF ULTRA CLEAN HOLDINGS, INC. - Ultra Clean Holdings, Inc.dex211.htm
EX-32.2 - CERTIFICATION OF CFO PURSUANT TO 18 U.S.C. SECTION 1350 - Ultra Clean Holdings, Inc.dex322.htm
EX-32.1 - CERTIFICATION OF CEO PURSUANT TO 18 U.S.C. SECTION 1350 - Ultra Clean Holdings, Inc.dex321.htm
EX-10.24 - SEPARATION AND RELEASE AGREEMENT - DAVID SAVAGE - Ultra Clean Holdings, Inc.dex1024.htm
10-K - FORM 10-K - Ultra Clean Holdings, Inc.d10k.htm

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the incorporation by reference in Registration Statement Nos. 333-167530, 333-165782, 333-158108, 333-151335, 333-141989, 333-135147, 333-123820 and 333-114051 on Form S-8 and Registration Statement No. 333-172262 on Form S-3 of our report dated March 16, 2011, relating to the consolidated financial statements of Ultra Clean Holdings, Inc. and subsidiaries (the “Company”) appearing in this Annual Report on Form 10-K of the Company for the year ended December 31, 2010.

/s/ Deloitte & Touche LLP

San Jose, California

March 16, 2011