Attached files

file filename
10-K - FORM 10-K - ULTRATECH INCd10k.htm
EX-23 - CONSENT OF ERNST & YOUNG LLP - ULTRATECH INCdex23.htm
EX-31.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex311.htm
EX-32.1 - CERTIFICATIONS OF CEO AND CFO PURSUANT TO 18 U.S.C. SECTION 1350 - ULTRATECH INCdex321.htm
EX-31.2 - CERTIFICATION OF CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex312.htm
EX-10.13 - NEW FORM OF RESTRICTED STOCK UNIT ISSUANCE AGREEMENT - ULTRATECH INCdex1013.htm

EXHIBIT 21

SUBSIDIARIES OF ULTRATECH, INC.

The following is a list of Ultratech, Inc.’s subsidiaries including their jurisdiction of incorporation as of December 31, 2010:

 

Subsidiaries

  

Jurisdiction of incorporation

Ultratech CH    Korea
Ultratech International, Inc.    State of Delaware, USA
Ultratech GmbH    Germany
Ultra-Tech Technologies Israel Ltd.    Israel
Ultratech Kabushiki Kaisha    Japan
Ultratech Stepper East, Inc.    State of Delaware, USA
Surtek, Inc.    State of New York, USA
Ultratech Stepper (Thailand) Co. Ltd.    Thailand
Ultratech (Shanghai) Co. Ltd.    Peoples Republic of China
Ultratech (Singapore) Pte, Ltd.    Singapore
Ultratech Corporation    State of Nevada, USA
Ultratech Holding B.V. (Netherlands)    Netherlands
Ultratech SE Asia PTE Ltd. (Singapore)    Singapore