Attached files

file filename
10-K - FORM 10-K - Brooks Automation, Inc.b83431e10vk.htm
EX-3.9 - EX-3.9 - Brooks Automation, Inc.b83431exv3w9.txt
EX-10.3 - EX-10.3 - Brooks Automation, Inc.b83431exv10w3.txt
EX-10.1 - EX-10.1 - Brooks Automation, Inc.b83431exv10w1.txt
EX-3.10 - EX-3.10 - Brooks Automation, Inc.b83431exv3w10.htm
EX-10.2 - EX-10.2 - Brooks Automation, Inc.b83431exv10w2.txt
EX-3.12 - EX-3.12 - Brooks Automation, Inc.b83431exv3w12.htm
EX-3.11 - EX-3.11 - Brooks Automation, Inc.b83431exv3w11.htm
EX-10.6 - EX-10.6 - Brooks Automation, Inc.b83431exv10w6.txt
EX-10.42 - EX-10.42 - Brooks Automation, Inc.b83431exv10w42.htm
EX-10.34 - EX-10.34 - Brooks Automation, Inc.b83431exv10w34.txt
EX-10.25 - EX-10.25 - Brooks Automation, Inc.b83431exv10w25.txt
EX-10.40 - EX-10.40 - Brooks Automation, Inc.b83431exv10w40.htm
EX-10.31 - EX-10.31 - Brooks Automation, Inc.b83431exv10w31.txt
EX-10.18 - EX-10.18 - Brooks Automation, Inc.b83431exv10w18.txt
EX-10.19 - EX-10.19 - Brooks Automation, Inc.b83431exv10w19.txt
EX-10.13 - EX-10.13 - Brooks Automation, Inc.b83431exv10w13.txt
EX-10.21 - EX-10.21 - Brooks Automation, Inc.b83431exv10w21.txt
EX-10.33 - EX-10.33 - Brooks Automation, Inc.b83431exv10w33.txt
EX-10.35 - EX-10.35 - Brooks Automation, Inc.b83431exv10w35.txt
EX-10.36 - EX-10.36 - Brooks Automation, Inc.b83431exv10w36.txt
EX-10.32 - EX-10.32 - Brooks Automation, Inc.b83431exv10w32.txt
EX-10.20 - EX-10.20 - Brooks Automation, Inc.b83431exv10w20.txt
EX-32 - EX-32 - Brooks Automation, Inc.b83431exv32.htm
EX-31.01 - EX-31.01 - Brooks Automation, Inc.b83431exv31w01.htm
EX-31.02 - EX-31.02 - Brooks Automation, Inc.b83431exv31w02.htm
EX-23.01 - EX-23.01 - Brooks Automation, Inc.b83431exv23w01.htm
EX-10.37 - EX-10.37 - Brooks Automation, Inc.b83431exv10w37.htm
EXHIBIT 21.01
 
BROOKS AUTOMATION, INC.
SUBSIDIARIES OF THE REGISTRANT
 
     
Legal Entity
 
Jurisdiction
 
Brooks Automation (Delaware) LLC
  USA
Brooks Automation (France) SAS
  France
Brooks Automation (Germany) GmbH
  Germany
Brooks Automation (Singapore) PTE LTD
  Singapore
Brooks Automation Taiwan Company Ltd
  Taiwan
Brooks Automation (the Netherlands) BV
  The Netherlands
Brooks Automation (UK) Ltd
  UK
Brooks Automation Asia Ltd (own 70%)
  Korea
Brooks Automation Israel, Ltd
  Israel
Brooks Automation Korea Inc. 
  Korea
Brooks Automation Luxembourg SARL
  Luxembourg
Brooks Automation (Wuxi) Limited
  China
Brooks Automation Limited
  Hong Kong
Brooks Technology (Shanghai) Limited
  China
CTI Nuclear, Inc. 
  USA
Granville — Phillips Company
  USA
Helix Securities Corp. 
  USA
Helix Technology KK
  Japan
Helix Technology UK Limited
  UK
Interval Logic Corporation (own 90%)
  USA
Strathmore Corporation
  USA
Ulvac Cryogenics Inc. (50% JV in Japan)
  Japan
Yaskawa Brooks Automation, Inc. (50% JV in Japan)
  Japan


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