Attached files
| file | filename |
|---|---|
| 10-K - MKS INSTRUMENTS, INC. - MKS INSTRUMENTS INC | b78680e10vk.htm |
| EX-32.1 - EX-32.1 SECTION 906 CERTIFICATION OF CEO & CFO - MKS INSTRUMENTS INC | b78680exv32w1.htm |
| EX-21.1 - EX-21.1 SUBSIDIARIES OF THE REGISTRANT - MKS INSTRUMENTS INC | b78680exv21w1.htm |
| EX-31.1 - EX-31.1 SECTION 302 CERTIFICATION OF CEO - MKS INSTRUMENTS INC | b78680exv31w1.htm |
| EX-31.2 - EX-31.2 SECTION 302 CERTIFICATION OF CFO - MKS INSTRUMENTS INC | b78680exv31w2.htm |
EXHIBIT 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (No.
333-78069, 333-78071,
333-78073, 333-31224,
333-54486, 333-54488,
333-54490, 333-90498,
333-90500,
333-90502, 333-116385,
333-116387, 333-116389,
and 333-127221) and Form S-3 (No. 333-34450 and
333-109753) of MKS Instruments, Inc. of our report dated February 26, 2010 relating to
the financial statements, financial statement schedule and the effectiveness of internal control
over financial reporting, which appears in this Form 10-K.
/s/ PricewaterhouseCoopers LLP
Boston, Massachusetts
February 26, 2010
February 26, 2010