Attached files
| file | filename |
|---|---|
| EX-10.16 - EX-10.16 - VEECO INSTRUMENTS INC | veco-20201231xex10d16.htm |
| EX-10.30 - EX-10.30 - VEECO INSTRUMENTS INC | veco-20201231xex10d30.htm |
| EX-10.31 - EX-10.31 - VEECO INSTRUMENTS INC | veco-20201231xex10d31.htm |
| EX-31.1 - EX-31.1 - VEECO INSTRUMENTS INC | veco-20201231xex31d1.htm |
| EX-32.2 - EX-32.2 - VEECO INSTRUMENTS INC | veco-20201231xex32d2.htm |
| EX-10.1 - EX-10.1 - VEECO INSTRUMENTS INC | veco-20201231xex10d1.htm |
| EX-10.32 - EX-10.32 - VEECO INSTRUMENTS INC | veco-20201231xex10d32.htm |
| EX-10.17 - EX-10.17 - VEECO INSTRUMENTS INC | veco-20201231xex10d17.htm |
| EX-32.1 - EX-32.1 - VEECO INSTRUMENTS INC | veco-20201231xex32d1.htm |
| EX-31.2 - EX-31.2 - VEECO INSTRUMENTS INC | veco-20201231xex31d2.htm |
| 10-K - 10-K - VEECO INSTRUMENTS INC | veco-20201231x10k.htm |
| EX-23.1 - EX-23.1 - VEECO INSTRUMENTS INC | veco-20201231xex23d1.htm |
Exhibit 21.1
Subsidiaries of the Registrant
As of December 31, 2020
Subsidiary |
| Jurisdiction of Organization |
| Percentage Ownership(A) |
| | | | |
U.S. Subsidiaries | | | | |
Ultratech International Inc. | | DE | | 100% |
Veeco APAC LLC | | DE | | 100% |
Veeco Process Equipment Inc. | | DE | | 100% |
| | | | |
Foreign Subsidiaries | | | | |
Veeco Asia Pte. Ltd. | | Singapore | | 100% |
Veeco GmbH | | Germany | | 100% |
Veeco Instruments Limited | | England | | 100% |
Veeco Instruments (Shanghai) Co. Ltd. | | China | | 100% |
Veeco Japan Ltd. | | Japan | | 100% |
Veeco Korea LLC | | South Korea | | 100% |
Veeco Malaysia Sdn. Bhd. | | Malaysia | | 100% |
Veeco Netherlands BV | | Netherlands | | 100% |
Veeco Taiwan Inc. | | Taiwan | | 100% |
Ultra-Tech Technologies Israel Ltd. | | Israel | | 100% |
Ultratech Korea Holdings LLC | | Korea | | 100% |
| (A) | Includes direct and indirect ownership. |