Attached files
file | filename |
---|---|
10-K - 10-K - ENTEGRIS INC | entg-20201231.htm |
EX-32.2 - EX-32.2 - ENTEGRIS INC | entg-12312020xex322.htm |
EX-32.1 - EX-32.1 - ENTEGRIS INC | entg-12312020xex321.htm |
EX-31.2 - EX-31.2 - ENTEGRIS INC | entg-12312020xex312.htm |
EX-31.1 - EX-31.1 - ENTEGRIS INC | entg-12312020xex311.htm |
EX-24 - EX-24 - ENTEGRIS INC | entg-12312020xex24.htm |
EX-23 - EX-23 - ENTEGRIS INC | entg-12312020xex23.htm |
EX-10.4 - EX-10.4 - ENTEGRIS INC | exhibit104-stockoptiongran.htm |
EX-10.3 - EX-10.3 - ENTEGRIS INC | exhibit103-rsuawardagreeme.htm |
EX-10.2 - EX-10.2 - ENTEGRIS INC | exhibit102-performanceshar.htm |
EX-10.1 - EX-10.1 - ENTEGRIS INC | exhibit101-rsuawardagreeme.htm |
Exhibit 21
Subsidiaries of Entegris, Inc.
Name of Subsidiary | Jurisdiction | |||||||
ATMI International Trading Co. Ltd. | China | |||||||
ATMI Semiconductor New Materials Xi'an Co., Ltd. | China | |||||||
Digital Specialty Chemicals Limited | Canada | |||||||
Digital Specialty Chemicals, Inc. | New Hampshire | |||||||
Digital Specialty Chemicals UK Limited | United Kingdom | |||||||
Digital Specialty Chemicals LTD | Korea | |||||||
Entegris Asia LLC | Delaware | |||||||
Entegris Asia Pte. Ltd. | Singapore | |||||||
Entegris Ecosys LLC | Delaware | |||||||
Entegris GmbH | Germany | |||||||
Entegris GP, Inc. | Delaware | |||||||
Entegris International Holdings B.V. | The Netherlands | |||||||
Entegris International Holdings II B.V. | The Netherlands | |||||||
Entegris International Holdings III B.V. | The Netherlands | |||||||
Entegris International Holdings IV LLC | Delaware | |||||||
Entegris International Holdings V LLC | Delaware | |||||||
Entegris International Holdings VI LLC | Delaware | |||||||
Entegris International Holdings VII LLC | The Netherlands | |||||||
Entegris International Holdings, Inc. | Delaware | |||||||
Entegris Ireland Unlimited Company | Ireland | |||||||
Entegris Israel Ltd. | Israel | |||||||
Entegris Japan Co. Ltd. | Japan | |||||||
Entegris Korea Co., Ltd. | South Korea | |||||||
Entegris Korea II Ltd. | South Korea | |||||||
Entegris Malaysia Sdn. Bhd. | Malaysia | |||||||
Entegris (Shanghai) Microelectronics Trading Company Ltd. | China | |||||||
Entegris Pacific Ltd. | Delaware | |||||||
Entegris Professional Solutions, Inc. | Delaware | |||||||
Entegris Sarl | Luxembourg | |||||||
Entegris SAS | France | |||||||
Entegris Singapore Pte. Ltd. | Singapore | |||||||
Entegris Specialty Materials, LLC | Delaware | |||||||
Entegris Taiwan Enterprises Partnership | Taiwan | |||||||
Entegris Taiwan Holdings, Inc. | Delaware | |||||||
Entegris Taiwan Technologies Co. Ltd. | Taiwan | |||||||
Hangzhou Anow Microfiltration Co., Ltd. | China | |||||||
Hangzhou AiNuo Microfiltration Co., Ltd. | China | |||||||
Nihon Entegris G.K. | Japan | |||||||
Poco Graphite, Inc. | Delaware |