Attached files

file filename
EX-32.2 - EXHIBIT 32.2 - ENTEGRIS INCentg-12312019xex322.htm
EX-32.1 - EXHIBIT 32.1 - ENTEGRIS INCentg-12312019xex321.htm
EX-31.2 - EXHIBIT 31.2 - ENTEGRIS INCentg-12312019xex312.htm
EX-31.1 - EXHIBIT 31.1 - ENTEGRIS INCentg-12312019xex311.htm
EX-24 - EXHIBIT 24 - ENTEGRIS INCentg-12312019xex24.htm
EX-23 - EXHIBIT 23 - ENTEGRIS INCentg-12312019xex23.htm
EX-10.6 - EXHIBIT 10.6 - ENTEGRIS INCentg-12312019xex106.htm
EX-10.5 - EXHIBIT 10.5 - ENTEGRIS INCentg-12312019xex105.htm
EX-10.4 - EXHIBIT 10.4 - ENTEGRIS INCentg-12312019xex104.htm
EX-10.3 - EXHIBIT 10.3 - ENTEGRIS INCentg-12312019xex103.htm
EX-10.2 - EXHIBIT 10.2 - ENTEGRIS INCentg-12312019xex102.htm
EX-10.1 - EXHIBIT 10.1 - ENTEGRIS INCentg-12312019xex101.htm
EX-4.1 - EXHIBIT 4.1 - ENTEGRIS INCentg-12312019xex41.htm
10-K - 10-K - ENTEGRIS INCentg-12312019x10k.htm


Exhibit 21

Subsidiaries of Entegris, Inc.

Name of Subsidiary
 
Jurisdiction
ATMI International Trading Co. Ltd.
 
China
ATMI Semiconductor New Materials Xi'an Co., Ltd.
 
China
Digital Specialty Chemicals Limited
 
Canada
Digital Specialty Chemicals, Inc.
 
New Hampshire
Digital Specialty Chemicals UK Limited
 
United Kingdom
Digital Specialty Chemicals LTD
 
Korea
Entegris Asia LLC
 
Delaware
Entegris Asia Pte. Ltd.
 
Singapore
Entegris Ecosys LLC
 
Delaware
Entegris GmbH
 
Germany
Entegris GP, Inc.
 
Delaware
Entegris International Holdings B.V.
 
The Netherlands
Entegris International Holdings II B.V.
 
The Netherlands
Entegris International Holdings III B.V.
 
The Netherlands
Entegris International Holdings IV LLC
 
Delaware
Entegris International Holdings V LLC
 
Delaware
Entegris International Holdings VI LLC
 
Delaware
Entegris International Holdings VII LLC
 
The Netherlands
Entegris International Holdings, Inc.
 
Delaware
Entegris Ireland Unlimited Company
 
Ireland
Entegris Israel Ltd.
 
Israel
Entegris Japan Co. Ltd.
 
Japan
Entegris Korea II Ltd.
 
South Korea
Entegris Korea Ltd.
 
South Korea
Entegris Malaysia Sdn. Bhd.
 
Malaysia
Entegris (Shanghai) Microelectronics Trading Company Ltd.
 
China
Entegris Pacific Ltd.
 
Delaware
Entegris Professional Solutions, Inc.
 
Delaware
Entegris Sarl
 
Luxembourg
Entegris SAS
 
France
Entegris Singapore Pte. Ltd.
 
Singapore
Entegris Specialty Materials, LLC
 
Delaware
Entegris Taiwan Enterprises Partnership
 
Taiwan
Entegris Taiwan Holdings, Inc.
 
Delaware
Entegris Taiwan Technologies Co. Ltd.
 
Taiwan
Hangzhou Anow Microfiltration Co., Ltd.
 
China
Hangzhou AiNuo Microfiltration Co., Ltd.
 
China
Nihon Entegris G.K.
 
Japan
Poco Graphite, Inc.
 
Delaware
Pureline Co., Ltd.
 
South Korea