Attached files

file filename
EX-32.1 - CMC Materials, Inc.exhibit32_1k.htm
EX-31.2 - CMC Materials, Inc.exhibit31_2k.htm
EX-31.1 - CMC Materials, Inc.exhibit31_1k.htm
EX-24 - CMC Materials, Inc.exhibit24_1.htm
EX-23.1 - CMC Materials, Inc.exhibit23_1.htm
10-K - CMC Materials, Inc.form10k.htm
EXHIBIT 21.1


SUBSIDIARIES OF CABOT MICROELECTRONICS CORPORATION

Cabot Microelectronics Global Corporation (Delaware, U.S.)
Cabot Microelectronics Polishing Corporation (Delaware, U.S.)
Cobalt Merger Sub Corporation (Texas, U.S)
NexPlanar Corporation (Delaware, U.S.)
QED Technologies International, Inc. (Delaware, U.S.)
Cabot Microelectronics Japan KK (Japan)
Nihon Cabot Microelectronics KK (Japan)
Cabot Microelectronics B.V. (Netherlands)
Cabot Microelectronics Singapore Pte. Ltd. (Singapore)
Hanguk Cabot Microelectronics, LLC (South Korea)
Epoch Material Co., Ltd. (Taiwan)
Shanghai Cabot Microelectronics Co. Ltd. (China)