Attached files
| file | filename |
|---|---|
| EX-32.1 - EX-32.1 - ONTO INNOVATION INC. | nano-ex321_8.htm |
| EX-31.2 - EX-31.2 - ONTO INNOVATION INC. | nano-ex312_7.htm |
| EX-31.1 - EX-31.1 - ONTO INNOVATION INC. | nano-ex311_6.htm |
| EX-21.1 - EX-21.1 - ONTO INNOVATION INC. | nano-ex211_9.htm |
| EX-10.22 - EX-10.22 - ONTO INNOVATION INC. | nano-ex1022_724.htm |
| 10-K - 10-K - ONTO INNOVATION INC. | nano-10k_20161231.htm |
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557, 333-149339, 333-164088, 333-176502, 333-192183 and 333-213277) and on Form S-3 (No. 333-163168) of Nanometrics, Inc. of our report dated March 2, 2017 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.
/s/ PricewaterhouseCoopers LLP
San Jose, CA
March 2, 2017