Attached files

file filename
EX-23 - EXHIBIT 23 - ULTRATECH INCexhibit232015.htm
EX-31.2 - EXHIBIT 31.2 - ULTRATECH INCutekex31210k2015.htm
EX-31.1 - EXHIBIT 31.1 - ULTRATECH INCutekex31110-k2015.htm
EX-32.1 - EXHIBIT 32.1 - ULTRATECH INCutekex32110-k2015.htm
EX-10.1 - EXHIBIT 10.1 - ULTRATECH INCexhibit101stockissuancep.htm
10-K - 10-K - ULTRATECH INCutek10-k2015.htm

EXHIBIT 21
SUBSIDIARIES OF ULTRATECH, INC.
     The following is a list of Ultratech, Inc.’s subsidiaries including their jurisdiction of incorporation as of December 31, 2015:
 
 
 
Subsidiaries
 
Jurisdiction of incorporation
Ultratech CH
 
Korea
Ultratech International, Inc.
 
State of Delaware, USA
Ultratech GmbH
 
Germany
Ultra-Tech Technologies Israel Ltd.
 
Israel
Ultratech Kabushiki Kaisya
 
Japan
Ultratech Stepper East, Inc.
 
State of Delaware, USA
Surtek, Inc.
 
State of New York, USA
Ultratech Stepper (Thailand) Co. Ltd.
 
Thailand
Ultratech (Shanghai) Co. Ltd.
 
Peoples Republic of China
Ultratech Corporation
 
State of Nevada, USA
Ultratech Technology Holding B.V. (Netherlands)
 
Netherlands
Ultratech SE Asia PTE Ltd. (Singapore)
 
Singapore