Attached files
file | filename |
---|---|
EX-23.2 - EX-23.2 - VEECO INSTRUMENTS INC | a15-23356_1ex23d2.htm |
EX-32.2 - EX-32.2 - VEECO INSTRUMENTS INC | a15-23356_1ex32d2.htm |
EX-32.1 - EX-32.1 - VEECO INSTRUMENTS INC | a15-23356_1ex32d1.htm |
EX-31.1 - EX-31.1 - VEECO INSTRUMENTS INC | a15-23356_1ex31d1.htm |
EX-23.1 - EX-23.1 - VEECO INSTRUMENTS INC | a15-23356_1ex23d1.htm |
EX-10.21 - EX-10.21 - VEECO INSTRUMENTS INC | a15-23356_1ex10d21.htm |
10-K - 10-K - VEECO INSTRUMENTS INC | a15-23356_110k.htm |
EX-31.2 - EX-31.2 - VEECO INSTRUMENTS INC | a15-23356_1ex31d2.htm |
Exhibit 21.1
Subsidiaries of the Registrant
Subsidiary |
|
Jurisdiction of |
|
Percentage |
|
|
|
|
|
|
|
U.S. Subsidiaries |
|
|
|
|
|
|
|
|
|
|
|
Veeco ALD Inc. |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Veeco APAC Inc. |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Veeco Precision Surface Processing LLC |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Veeco Process Equipment Inc. |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Veeco PSP Blocker A Corp. |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Veeco TK LLC |
|
DE |
|
100 |
% |
|
|
|
|
|
|
Foreign Subsidiaries |
|
|
|
|
|
|
|
|
|
|
|
Veeco ALD Korea Ltd. |
|
South Korea |
|
100 |
% |
|
|
|
|
|
|
Veeco Asia Pte. Ltd. |
|
Singapore |
|
100 |
% |
|
|
|
|
|
|
Veeco Instruments GmbH |
|
Germany |
|
100 |
% |
|
|
|
|
|
|
Veeco Instruments Limited |
|
England |
|
100 |
% |
|
|
|
|
|
|
Veeco Instruments (Shanghai) Co. Ltd. |
|
China |
|
100 |
% |
|
|
|
|
|
|
Veeco Korea LLC |
|
South Korea |
|
100 |
% |
|
|
|
|
|
|
Veeco Malaysia Sdn. Bhd. |
|
Malaysia |
|
100 |
% |
|
|
|
|
|
|
Veeco Netherlands BV |
|
Netherlands |
|
100 |
% |
|
|
|
|
|
|
Veeco Taiwan Inc. |
|
Taiwan |
|
100 |
% |
(A) Includes direct and indirect ownership.