Attached files

file filename
EX-31.1 - EX-31.1 - ONTO INNOVATION INC.nano-ex311_9.htm
EX-23.1 - EX-23.1 - ONTO INNOVATION INC.nano-ex231_8.htm
EX-31.2 - EX-31.2 - ONTO INNOVATION INC.nano-ex312_6.htm
EX-21.1 - EX-21.1 - ONTO INNOVATION INC.nano-ex211_10.htm
10-K - 10-K - ONTO INNOVATION INC.nano-10k_20151226.htm

Exhibit 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER

PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED

PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Each of the undersigned hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, in his capacity as an officer of Nanometrics Incorporated (the “Company”) that based on his knowledge:

 

1.

The Annual Report on Form 10-K of the Company for the fiscal year ended December 26, 2015 (the “Report”) fully complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934, as amended, and

 

2.

The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

 

Date:

February 24, 2016

 

By:

 /S/ TIMOTHY J. STULTZ

 

 

 

Name:

 Timothy J. Stultz

 

 

 

Title:

 Chief Financial Officer

 

 

 

 

 

Date:

February 24, 2016

 

By:

 /S/ JEFFREY ANDRESON

 

 

 

Name:

 Jeffrey Andreson

 

 

 

Title:

 Chief Financial Officer