Attached files

file filename
EX-32.1 - EX-32.1 - ONTO INNOVATION INC.nano-ex321_7.htm
EX-31.1 - EX-31.1 - ONTO INNOVATION INC.nano-ex311_9.htm
EX-23.1 - EX-23.1 - ONTO INNOVATION INC.nano-ex231_8.htm
EX-31.2 - EX-31.2 - ONTO INNOVATION INC.nano-ex312_6.htm
10-K - 10-K - ONTO INNOVATION INC.nano-10k_20151226.htm

Exhibit 21.1

List of Subsidiaries

 

Name

 

Jurisdiction

 

 

 

Nanometrics France S.A.S

 

France

 

 

 

Accent Optical Technologies (Germany) GmbH

 

Germany

 

 

 

Nanometrics (Switzerland) GmbH

 

Switzerland

 

 

 

Nanometrics U.K. Ltd.

 

United Kingdom

 

 

 

Nanometrics China Company Ltd.

 

China

 

 

 

Nanometrics Israel, Ltd.

 

Israel

 

 

 

Nanometrics Japan K.K.

 

Japan

 

 

 

Nanometrics Korea Limited

 

South Korea

 

 

 

Nanometrics Southeast Asia Pte. Limited

 

Singapore

 

 

 

Nanda Technologies GmbH

 

Germany