Attached files
| file | filename |
|---|---|
| EX-32.2 - EXHIBIT 32.2 - ULTRATECH INC | utekex31210k2014.htm |
| EX-21 - EXHIBIT 21 - ULTRATECH INC | exhibit212014.htm |
| EX-31.1 - EXHIBIT 31.1 - ULTRATECH INC | utekex31110-k2014.htm |
| EX-32.1 - EXHIBIT 32.1 - ULTRATECH INC | utekex32110-k2014.htm |
| EXCEL - IDEA: XBRL DOCUMENT - ULTRATECH INC | Financial_Report.xls |
| 10-K - 10-K - ULTRATECH INC | utek10-k2014.htm |
EXHIBIT 23
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We consent to the incorporation by reference in the following Registration Statements:
(1) | Registration Statements (Form S-8 Nos. 333-132302, 333-122551, 333-112448, 333-103228, 333-81396, 333-33338, 333-51117, 333-06301 and 333-176052) pertaining to the 1993 Stock Option/Stock Issuance Plan of Ultratech, Inc., |
(2) | Registration Statements (Form S-8 Nos. 333-83954 and 333-43952) pertaining to the Supplemental Stock Option/ Stock Issuance Plan of Ultratech, Inc., |
(3) | Registration Statement (Form S-8 No. 333-93653) pertaining to the 1998 Supplemental Stock Option/ Stock Issuance Plan of Ultratech, Inc., |
(4) | Registration Statement (Form S-8 No. 333-85161) pertaining to the 1993 Stock Option/ Stock Issuance Plan, 1998 Supplemental Stock Option/ Stock Issuance Plan, and Employee Stock Purchase Plan of Ultratech, Inc., and |
(5) | Registration Statement (Form S-8 No. 333-33197) pertaining to the 1993 Stock Option/ Stock Issuance Plan and Employee Stock Purchase Plan of Ultratech, Inc.; |
of our reports dated February 27, 2015 with respect to the consolidated financial statements and schedule of Ultratech, Inc., and the effectiveness of internal control over financial reporting of Ultratech, Inc. included in this Annual Report (Form 10-K) of Ultratech, Inc. for the year ended December 31, 2014.
/s/ ERNST & YOUNG LLP
San Jose, California
February 27, 2015