Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - ONTO INNOVATION INC.Financial_Report.xls
EX-21.1 - EXHIBIT 21.1 - ONTO INNOVATION INC.a201410kexhibit211.htm
EX-23.1 - EXHIBIT 23.1 - ONTO INNOVATION INC.a201410kexhibit231.htm
EX-31.1 - EXHIBIT 31.1 - ONTO INNOVATION INC.a201410kexhibit311.htm
EX-31.2 - EXHIBIT 31.2 - ONTO INNOVATION INC.a201410kexhibit312.htm
10-K - 10-K - ONTO INNOVATION INC.a201410-k.htm
EX-10.16 - EXHIBIT 10.16 - ONTO INNOVATION INC.a201410kexhibit1016.htm


Exhibit 32.1
CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER
PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED
PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002
Each of the undersigned hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, in his capacity as an officer of Nanometrics Incorporated (the “Company”) that based on his knowledge:
1.
The Annual Report on Form 10-K of the Company for the fiscal year ended December 27, 2014 (the “Report”) fully complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934, as amended, and
2.
The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

Date:
February 24, 2015
By:
/S/ TIMOTHY J. STULTZ
 
 
Name:
Title:
Timothy J. Stultz
Chief Financial Officer
 
 
 
 
Date:
February 24, 2015
By:
/S/ JEFFREY ANDRESON
 
 
Name:
Title:
Jeffrey Andreson Chief Financial Officer