Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - ONTO INNOVATION INC.Financial_Report.xls
EX-23.1 - EXHIBIT 23.1 - ONTO INNOVATION INC.a201410kexhibit231.htm
EX-31.1 - EXHIBIT 31.1 - ONTO INNOVATION INC.a201410kexhibit311.htm
EX-31.2 - EXHIBIT 31.2 - ONTO INNOVATION INC.a201410kexhibit312.htm
10-K - 10-K - ONTO INNOVATION INC.a201410-k.htm
EX-32.1 - EXHIBIT 32.1 - ONTO INNOVATION INC.a201410kexhibit321.htm
EX-10.16 - EXHIBIT 10.16 - ONTO INNOVATION INC.a201410kexhibit1016.htm


Exhibit 21.1
List of Subsidiaries
 
 
 
Name
 
Jurisdiction
 
 
 
Nanometrics France S.A.S
 
France
 
 
 
Accent Optical Technologies (Germany) GmbH
 
Germany
 
 
 
Nanometrics (Switzerland) GmbH
 
Switzerland
 
 
 
Nanometrics U.K. Ltd.
 
United Kingdom
 
 
 
Nanometrics China Company Ltd.
 
China
 
 
 
Nanometrics Israel, Ltd.
 
Israel
 
 
 
Nanometrics Japan K.K.
 
Japan
 
 
 
Nanometrics Korea Limited
 
South Korea
 
 
 
Nanometrics Southeast Asia Pte. Limited
 
Singapore
 
 
 
Nanda Technologies GmbH
 
Germany