Attached files

file filename
EXCEL - IDEA: XBRL DOCUMENT - RUDOLPH TECHNOLOGIES INCFinancial_Report.xls
10-Q - QUARTERLY REPORT - RUDOLPH TECHNOLOGIES INCrtec10qq32011.htm
EX-32.1 - EXHIBIT 32.1 - RUDOLPH TECHNOLOGIES INCrtec9302011ex321.htm
EX-31.1 - EXHIBIT 31.1 - RUDOLPH TECHNOLOGIES INCrtec9302011ex311.htm
EX-31.2 - EXHIBIT 31.2 - RUDOLPH TECHNOLOGIES INCrtec9302011ex312.htm
EX-10.6 - EXHIBIT 10.6 - RUDOLPH TECHNOLOGIES INCrtec9302011exhibit106.htm


Exhibit 32.2
 



CERTIFICATION OF CHIEF FINANCIAL OFFICER
PURSUANT TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

 
I, Steven R. Roth, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that the Quarterly Report of Rudolph Technologies, Inc. on Form 10-Q for the quarter ended September 30, 2011 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934 and that information contained in such Quarterly Report on Form 10-Q fairly presents in all material respects the financial condition and results of operations of Rudolph Technologies, Inc.
 
 

Date: November 2, 2011

 
 
By: 
/s/  STEVEN R. ROTH
 
 
Steven R. Roth
Senior Vice President and Chief Financial Officer