Attached files
| file | filename |
|---|---|
| 10-K - ANNUAL REPORT - AMTECH SYSTEMS INC | amtech_10k.htm |
| EX-23.1 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - AMTECH SYSTEMS INC | exhibit23-1.htm |
| EX-32.1 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INC | exhibit32-1.htm |
| EX-32.2 - CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350 - AMTECH SYSTEMS INC | exhibit32-2.htm |
| EX-24.1 - POWER OF ATTORNEY - AMTECH SYSTEMS INC | exhibit24-1.htm |
| EX-31.2 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INC | exhibit31-2.htm |
| EX-31.1 - CERTIFICATION PURSUANT TO RULE 13A-14(A)/15D-14(A) - AMTECH SYSTEMS INC | exhibit31-1.htm |
Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
SUBSIDIARIES OF THE REGISTRANT
| Name | Jurisdiction in which incorporated | |
| Tempress Systems, Inc. | State of Texas | |
| Tempress Holdings B.V. | The Netherlands | |
| Tempress Systems B.V. | The Netherlands | |
| Tempress Manufacturing B.V. | The Netherlands | |
| Tempress Engineering B.V. | The Netherlands | |
| Tempress Onroerend Goed B.V | The Netherlands | |
| P.R. Hoffman Machine Products, Inc | State of Arizona | |
| Bruce Technologies, Inc | State of Massachusetts | |
| Bruce Technologies Europe GmbH | Federal Republic of Germany | |
| R2D Automation SAS | France |
72