Attached files
| file | filename |
|---|---|
| 10-K - ZYGO CORP | c62738_10k.htm |
| EX-32.2 - ZYGO CORP | c62738_ex32-2.htm |
| EX-32.1 - ZYGO CORP | c62738_ex32-1.htm |
| EX-31.2 - ZYGO CORP | c62738_ex31-2.htm |
| EX-31.1 - ZYGO CORP | c62738_ex31-1.htm |
| EX-23.1 - ZYGO CORP | c62738_ex23-1.htm |
EXHIBIT 21
SUBSIDIARIES OF ZYGO CORPORATION (DELAWARE)
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Zygo KK (Japan) |
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100% owned by Registrant (effective as of October 1, 1999) |
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Zygo PTE LTD (Singapore) |
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100% owned by Registrant (effective as of January 1, 1998) |
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ZygoLamda Metrology Instrument (Shanghai) Co., Ltd. (China) |
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66% owned by Zygo PTE LTD (effective as of April 3, 2008) |
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Zygo Germany, GmbH (Germany) |
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100% owned by Registrant (effective as of December 1, 2006) |
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ZygoLOT GmbH (Germany) |
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60% owned by Zygo Germany, GmbH (effective as of December 28, 2006) |
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Six Brookside Drive (Connecticut) |
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100% owned by Registrant (effective as of January 9, 1998) |
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Zygo Canada Inc. (Canada) |
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100% owned by Registrant (effective as of February 22, 2008) |
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Zygo Singapore Inspection Systems PTE. LTD. (Singapore) |
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100% owned by Zygo Canada Inc. (effective as of February 28, 2008) |
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Zemetrics (Arizona) |
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100% owned by Registrant (effective as of January 22, 2010) |