On June 8, 2010, the Board of Directors of Mattson Technology (the "Company") adopted a new form of indemnity agreement (the "Indemnity Agreement") which the Company expects to enter into with all of its directors and executive officers. The Indemnity Agreement replaces a prior form of indemnity agreement that the Company adopted in 1997.

The Indemnity Agreement provides, among other things, that subject to the procedures set forth in the Indemnification Agreement: (i) the Company will indemnify, hold harmless and exonerate the Indemnitee (as defined in the Indemnification Agreement) to the fullest extent permitted by applicable law and subject to certain limitations and exceptions, in the event Indemnitee was, is or is threatened to be made a party to or a participant (as a witness or otherwise) in a Proceeding (as defined in the Indemnification Agreement); (ii) if requested by Indemnitee, and subject to certain exceptions, the Company will advance Expenses (as defined in the Indemnification Agreement) incurred in connection with any Proceeding to the Indemnitee; and (iii) the rights of the Indemnitee under the Indemnification Agreement are in addition to any other rights the Indemnitee may have under applicable law, the Company's articles of incorporation or bylaws, or otherwise. The Indemnification Agreement also sets forth the procedures for determining entitlement to indemnification, the requirements relating to notice and defense of claims for which indemnification is sought, the procedures for enforcement of indemnification rights, the limitations on and exclusions from indemnification, and the minimum levels of directors' and officers' liability insurance to be maintained by the Company.

The foregoing summary of the Indemnification Agreement is qualified in its entirety by reference to the full text of the Indemnification Agreement referenced as Exhibit 10.1 hereto and incorporated by reference herein.