Attached files

file filename
EX-21 - SUBSIDIARIES OF REGISTRANT - ULTRATECH INCdex21.htm
EX-31.2 - CERTIFICATION OF CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex312.htm
EX-31.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex311.htm
10-K - FOR THE FISCAL YEAR ENDED DECEMBER 31, 2009 - ULTRATECH INCd10k.htm
EX-23 - CONSENT OF ERNST & YOUNG LLP, INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - ULTRATECH INCdex23.htm

EXHIBIT 32.1

CERTIFICATIONS OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER

PURSUANT TO 18 U.S.C. SECTION 1350,

AS ADOPTED PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

I, Arthur Zafiropoulo, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that, to my knowledge:

 

   

the Annual Report of Ultratech, Inc. on Form 10-K for the year ended December 31, 2009 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

 

   

the information contained in such Annual Report fairly presents in all material respects the financial condition and results of operations of Ultratech, Inc.

 

By:  

/S/ ARTHUR ZAFIROPOULO

     Date: March 1, 2010
Name:   Arthur Zafiropoulo     
Title:   Chief Executive Officer     

I, Bruce Wright, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that, to my knowledge:

 

   

the Annual Report of Ultratech, Inc. on Form 10-K for the year ended December 31, 2009 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and

 

   

the information contained in such Annual Report fairly presents in all material respects the financial condition and results of operations of Ultratech, Inc.

 

By:  

/S/ BRUCE WRIGHT

     Date: March 1, 2010
Name:   Bruce Wright     
Title:   Chief Financial Officer