ULTRATECH INC - FORM 10-K - EX-21 - SUBSIDIARIES OF REGISTRANT - March 1, 2010

Attached files

file filename
EX-31.2 - CERTIFICATION OF CHIEF FINANCIAL OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex312.htm
EX-32.1 - CERTIFICATIONS OF CEO AND CFO PURSUANT TO 18 U.S.C. SECTION 1350 - ULTRATECH INCdex321.htm
EX-31.1 - CERTIFICATION OF CHIEF EXECUTIVE OFFICER PURSUANT TO SECTION 302 - ULTRATECH INCdex311.htm
10-K - FOR THE FISCAL YEAR ENDED DECEMBER 31, 2009 - ULTRATECH INCd10k.htm
EX-23 - CONSENT OF ERNST & YOUNG LLP, INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - ULTRATECH INCdex23.htm

EXHIBIT 21

SUBSIDIARIES OF ULTRATECH, INC.

The following is a list of Ultratech, Inc.’s subsidiaries including their jurisdiction of incorporation as of December 31, 2009:

 

Subsidiaries

   

Jurisdiction of incorporation

Ultratech CH    Korea
Ultratech International, Inc.    State of Delaware, USA
Ultratech GmbH    Germany
Ultra-Tech Technologies Israel Ltd.    Israel
Ultratech Kabushiki Kaisha    Japan
Ultratech Stepper East, Inc.    State of Delaware, USA
Surtek, Inc.    State of New York, USA
Ultratech Stepper (Thailand) Co. Ltd.    Thailand
Ultratech (Shanghai) Co. Ltd.    Peoples Republic of China
Ultratech (Singapore) Pte, Ltd.    Singapore
Ultratech Corporation    State of Nevada, USA

ULTRATECH INC Reports

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