Attached files

file filename
10-K - FORM 10-K - INTEVAC INCf55037e10vk.htm
EX-21.1 - EX-21.1 - INTEVAC INCf55037exv21w1.htm
EX-32.1 - EX-32.1 - INTEVAC INCf55037exv32w1.htm
EX-23.2 - EX-23.2 - INTEVAC INCf55037exv23w2.htm
EX-31.2 - EX-31.2 - INTEVAC INCf55037exv31w2.htm
EX-31.1 - EX-31.1 - INTEVAC INCf55037exv31w1.htm
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
     We have issued our reports dated February 26, 2010, with respect to the consolidated financial statements, schedule, and internal control over financial reporting included in the Annual Report of Intevac, Inc. and subsidiaries on Form 10-K for the year ended December 31, 2009. We hereby consent to the incorporation by reference of said reports in the Registration Statements of Intevac, Inc. and subsidiaries on Forms S-8 (File No. 333-160596, effective July 15, 2009; File No. 333-152773, effective August 5, 2008; File No. 333-143418, effective May 31, 2007; File No. 333-134422, effective May 24, 2006; File No. 333-125523, effective June 6, 2005; File No. 333-109260, effective September 29, 2003; File No. 333-106960, effective July 11, 2003; File No. 333-50166, effective November 17, 2000; and File No. 333-65421, effective October 7, 1998).
         
     
/s/ GRANT THORNTON LLP      

San Jose, California 
   
February 26, 2010