ENTEGRIS INC - FORM 10-K - EX-23 - CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM - February 25, 2010

Attached files

file filename
10-K - FORM 10-K - ENTEGRIS INCd10k.htm
EX-21 - SUBSIDIARIES OF ENTEGRIS, INC. - ENTEGRIS INCdex21.htm
EX-24 - POWER OF ATTORNEY BY THE DIRECTORS OF ENTEGRIS, INC. - ENTEGRIS INCdex24.htm
EX-31.1 - CERTIFICATION PURSUANT SECTION 302 - ENTEGRIS INCdex311.htm
EX-10.2 - 2009 STOCK OPTION AWARD AGREEMENT - ENTEGRIS INCdex102.htm
EX-31.2 - CERTIFICATION PURSUANT SECTION 302 - ENTEGRIS INCdex312.htm
EX-10.7 - FIFTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex107.htm
EX-32.2 - CERTIFICATION PURSUANT SECTION 906 - ENTEGRIS INCdex322.htm
EX-10.3 - FIRST AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex103.htm
EX-10.4 - SECOND AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex104.htm
EX-32.1 - CERTIFICATION PURSUANT SECTION 906 - ENTEGRIS INCdex321.htm
EX-10.9 - SEVENTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex109.htm
EX-10.5 - THIRD AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex105.htm
EX-10.1 - 2009 RSU UNIT AWARD AGREEMENT - ENTEGRIS INCdex101.htm
EX-10.6 - FOURTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex106.htm
EX-10.10 - EIGHTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex1010.htm
EX-10.17 - THIRD AMENDED AND RESTATED MEMBRANE MANUFACTURE AND SUPPLY AGREEMENT - ENTEGRIS INCdex1017.htm
EX-10.16 - 2010 STOCK PLAN - ENTEGRIS INCdex1016.htm
EX-10.15 - AMENDMENT TO AMENDED AND RESTATED SERP - ENTEGRIS INCdex1015.htm
EX-10.13 - ELEVENTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex1013.htm
EX-10.11 - NINTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex1011.htm
EX-10.14 - TWELFTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex1014.htm
EX-10.12 - TENTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex1012.htm
EX-10.8 - SIXTH AMENDMENT TO 401(K) SAVINGS AND PROFIT SHARING PLAN - ENTEGRIS INCdex108.htm

Exhibit 23

Consent of Independent Registered Public Accounting Firm

The Board of Directors and Shareholders

Entegris, Inc.:

We consent to the incorporation by reference in the registration statements (Nos. 333-160212 and 333-105962) on Form S-3 and (Nos. 333-127599 and 333-53382) on Form S-8 of Entegris, Inc. of our report dated February 25, 2010, with respect to the consolidated balance sheets of Entegris, Inc. as of December 31, 2009 and 2008, and the related consolidated statements of operations, equity and comprehensive income (loss), and cash flows for each of the years in the three-year period ended December 31, 2009 and the effectiveness of internal control over financial reporting as of December 31, 2009, which report appears in the December 31, 2009 annual report on Form 10-K of Entegris, Inc.

/s/ KPMG LLP

Minneapolis, Minnesota

February 25, 2010

ENTEGRIS INC Reports