Attached files
Exhibit 21.1
SUBSIDIARIES OF NOVELLUS SYSTEMS, INC. (a California corporation)
| Name |
Jurisdiction | |
| Novellus Systems Export, Inc. | Barbados | |
| GaSonics World Trade Inc. | Barbados | |
| Novellus Systems International, LLC | California, United States | |
| Angstron Systems, Inc. | California, United States | |
| Gamma Precision Technology | California, United States | |
| Simation | Canada | |
| Novellus Systems International Holdings Ltd. | Cayman Islands | |
| Novellus Systems Semiconductor Equipment Shanghai Co. Ltd. | China | |
| Novellus Systems International Trading (Shanghai) Co. Ltd. | China | |
| Novellus International Holdco, Inc. | Delaware, United States | |
| SpeedFam-IPEC International Services, LLC | Delaware, United States | |
| Tmation Inc. | Delaware, United States | |
| Novellus Development Company, LLC | Delaware, United States | |
| Novellus Systems SARL | France | |
| Novellus Singapore Pte. Ltd., France Branch | France | |
| Novellus Systems GmbH | Germany | |
| Novellus Systems Service GmbH | Germany | |
| NHL Sub GmbH | Germany | |
| Peter Wolters GmbH | Germany | |
| Novellus Systems (H.K.) Limited | Hong Kong | |
| Novellus Systems Service (Hong Kong) Limited | Hong Kong | |
| Peter Wolters of America, Inc. | Illinois, United States | |
| Novellus Systems (India) Pvt. Ltd. | India | |
| Novellus Systems Ireland Ltd. | Ireland | |
| GaSonics Ireland Ltd. | Ireland | |
| Novellus Systems Israel Ltd. | Israel | |
| GaSonics Israel Ltd. | Israel | |
| Novellus Systems Italy SRL | Italy | |
| Peter Wolters Japan Co., Ltd. | Japan | |
| Novellus Systems Japan, G.K. | Japan | |
| Novellus Singapore Pte. Ltd., Japan Branch | Japan | |
| SpeedFam IPEC (Malaysia) Sdn. Bhd. | Malaysia | |
| Novellus Systems (Malaysia) Sdn. Bhd. | Malaysia | |
| Novellus Singapore Pte. Ltd., Malaysia Branch | Malaysia | |
| Novellus Systems BV | Netherlands | |
| Novellus Systems International BV | Netherlands | |
| Voumard, Inc. | New York, United States | |
| Novellus Korea LLC | Republic of South Korea | |
| Novellus Singapore Pte. Ltd., Korea Branch | Republic of South Korea | |
| Novellus Systems International BV, Singapore Branch | Singapore | |
| Novellus Singapore Pte. Ltd. | Singapore | |
| Novellus Singapore Holdings Pte. Ltd. | Singapore | |
| Novellus Systems Inc., Singapore Branch | Singapore | |
| Novellus Systems (Schweiz) Holding GmbH | Switzerland | |
| Voumard Machines Co SARL | Switzerland | |
| Novellus Systems (H.K.) Limited, Taiwan Branch | Taiwan | |
| Novellus Systems Service (Hong Kong) Limited, Taiwan Branch | Taiwan | |
| Peter Wolters UK Ltd. | United Kingdom | |
| Novellus Systems UK Limited | United Kingdom | |
| Novellus Vietnam LLC | Vietnam |