Attached files

file filename
10-K - FORM 10-K - ATMI INCc96516e10vk.htm
EX-32 - EXHIBIT 32 - ATMI INCc96516exv32.htm
EX-23 - EXHIBIT 23 - ATMI INCc96516exv23.htm
EX-31.1 - EXHIBIT 31.1 - ATMI INCc96516exv31w1.htm
EX-31.2 - EXHIBIT 31.2 - ATMI INCc96516exv31w2.htm
Exhibit 21
ATMI, INC.
Subsidiaries
     
Entity   State or Jurisdiction of Incorporation or Organization
Advanced Technology Materials, Inc.
  Delaware
ATMI Ecosys Corporation
  California
Advanced Delivery & Chemical Systems Nevada, Inc.
  Nevada
Advanced Delivery & Chemical Systems Holdings, LLC
  Delaware
Advanced Delivery & Chemical Systems Operating, LLC
  Delaware
Advanced Delivery & Chemical Systems Manager, Inc.
  Delaware
ATMI Materials, Ltd.
  Texas
ATMI Korea Co., Ltd.
  South Korea
ATMI Packaging, Inc.
  Minnesota
ATMI International Holdings, Inc.
  Delaware
ATMI Taiwan Holdings, Inc.
  Delaware
ATMI Belgium Holdings, Inc.
  Delaware
ATMI Belgium, LLC
  Delaware
ATMI N.V.
  Belgium
ATMI International Trading Co., Ltd.
  China
ATMI Japan KK
  Japan
ATMI Taiwan Co., Ltd.
  Taiwan
ATMI GmbH
  Germany
ATMI PTE Ltd
  Singapore
ATMI Fab Services Ireland, Ltd
  Ireland
ATMI Acquisition BVBA
  Belgium
LevTech, Inc.
  Delaware

 

F-37